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The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.
Focused ion beams. --- Focused ion beams --- Ion bombardment. --- Industrial applications.
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Diffraction patterns. --- Hardening (materials) --- Ion beams. --- Nitriding. --- Steels.
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In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.
Focused ion beams --- Ion bombardment --- Industrial applications. --- Industrial applications.
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Adhesion. --- Boron nitrides. --- Deposition. --- Fracture mechanics. --- Ion beams. --- Tribology. --- Adhesion. --- Fracture mechanics. --- Ion bombardment. --- Tribology.
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Elastic waves. --- Heating. --- Ion beams. --- Metal surfaces. --- Momentum transfer. --- Ion impact.
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Boundary layers. --- Earth ionosphere. --- Electromagnetic noise. --- Electrostatics. --- Geomagnetic tail. --- Ion beams. --- Magnetohydrodynamic stability. --- Plasma sheaths.
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Ion engines. --- Thrust measurement. --- Charged particles. --- Current density. --- Ion beams. --- Thrust.
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Ion bombardment --- Beams, Ion --- Bombardment, Ion --- Impact, Ion --- Ion beams --- Ion impact --- Ionic bombardment --- Collisions (Nuclear physics) --- Ions
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Ion bombardment. --- Beams, Ion --- Bombardment, Ion --- Impact, Ion --- Ion beams --- Ion impact --- Ionic bombardment --- Collisions (Nuclear physics) --- Ions
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Ion beams. --- Sapphire. --- Transmission electron microscopy. --- X ray diffraction. --- Single crystals. --- Rhombohedrons. --- Germanium. --- Density measurement. --- Crystal structure.
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